Vacuum Pump Market Size and Share

Vacuum Pump Market (2025 - 2030)
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Vacuum Pump Market Analysis by Mordor Intelligence

The vacuum pump market is valued at USD 7.56 billion in 2025 and is projected to reach USD 10.51 billion by 2030, translating to a 6.81% CAGR. Demand pivots from general industrial duty toward ultra-clean, high-throughput environments in semiconductor lithography, battery manufacturing and biologics fill-finish. Mechanical architectures continue to dominate, yet dry-running variants accelerate as fabs and cell plants eliminate hydrocarbon risk and prepare for PFAS lubricant bans. Supply-side investment underwrites this trajectory: Edwards Vacuum is spending USD 319 million on a New York dry-pump plant to serve domestic chip fabs, while Atlas Copco deepens capacity via bolt-on acquisitions in Korea and China. Regulatory calls for energy frugality further stimulate adoption of smart, variable-speed systems able to cut pump‐related power loads by 20-30%.

Key Report Takeaways

  • By pump principle – Rotary-vane mechanical pumps led with 28% of vacuum pump market share in 2024; cryogenic entrapment designs are forecast to expand at an 8.70% CAGR through 2030.
  • By lubrication – Dry architectures held 53% of the vacuum pump market size in 2024 and are projected to grow at an 8.50% CAGR to 2030.
  • By vacuum level – Rough vacuum retained 46% revenue share in 2024, while ultra-high vacuum is advancing at a 9.20% CAGR through 2030.
  • By end-user industry – The semiconductor sector accounted for 32% of the vacuum pump market size in 2024; battery manufacturing is set to post the fastest 8.40% CAGR between 2025-2030.
  • By geography – APAC commanded 48% of vacuum pump market share in 2024 and is forecast to record a 7.80% CAGR to 2030.

Segment Analysis

By Pump Principle: Mechanical platforms retain scale advantage

Mechanical pumps generated the largest slice of the vacuum pump market in 2024, anchored by rotary-vane designs that captured 28% of vacuum pump market share. Reliability under medium vacuum and cost competitiveness sustain adoption across packaging, chemicals and chip backend processes. Yet high-growth niches now emerge in kinetic and entrapment families. Cryogenic entrapment models are forecast to lift the vacuum pump market size by 8.70% CAGR as hydrogen liquefaction, space simulation and quantum computing labs specify sub-5 K environments. Vendors blend traditional cast-iron robustness with digital controls to deliver hybrid value propositions.

Smart-ready mechanical skids integrate pressure sensors, vibration monitors and cloud gateways to create data loops that feed fab-wide asset health platforms. Edwards and Pfeiffer leverage integrated controller stacks to shorten commissioning time and simplify SEMI S2 compliance checks. Moreover, modular layouts let end users upgrade from oil-sealed to dry configurations without re-piping entire lines, preserving sunk capital while meeting contamination limits. Competitive advantage now rests on lifecycle cost models that factor energy, consumables and unscheduled downtime rather than headline purchase price.

Industrial Vacuum Pumps Market
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By Lubrication: Dry architectures accelerate amid PFAS scrutiny

Dry pumps represented 53% of the vacuum pump market in 2024 and are expected to grow 8.50% CAGR through 2030 as fabs pursue zero-contamination regimes. Eliminating oil removes wafer-killing aerosols and helps battery cell makers maintain electrode purity. Stringent PFAS curves reinforce the shift by raising uncertainty over continued use of fluorinated oils. Busch’s COBRA NC portfolio highlights gains: 55% energy savings and 30% lower maintenance hours translate into breakeven payback within 18 months for high-duty installations.

Oil-sealed pumps remain relevant in labs and general industry where target vacua are moderate and budgets tight. Here, suppliers differentiate through hybrid designs featuring gas ballast enhancements that cut oil backstreaming. Some OEMs bundle environmental packages micro-mist filters and closed-loop oil reclaim—to extend the life of legacy assets while easing compliance risk. Over the forecast horizon, dry technology is set to become baseline for any facility rated ISO Class 5 or better.

By Vacuum Level: Ultra-high vacuum (UHV) outpaces all tiers

UHV applications below 10⁻⁷ mbar are growing at the fastest rate, with a 9.20% CAGR, thereby expanding the vacuum pump market size in premium semiconductor and surface science domains. ASML EUV scanners mandate hydrogen-compatible UHV clusters, prompting multi-million-dollar purchase orders per fab module. Particle physics labs and gravitational-wave observatories reinforce demand as they initiate capacity-expansion cycles. Conversely, rough vacuum persists as the volume backbone 46% share in 2024, servicing food, paper, and plastics, where throughput eclipses purity.

Material selection shifts from stainless steel to low-outgassing alloys and ceramic coatings, driving cost differentiation. Edwards and Leybold integrate helium leak detectors and residual gas analyzers to certify chamber integrity prior to shipping, reducing onsite qualification time. Hybrid pumping trains, turbomolecular heads with backing scroll pumps, gain currency, balancing speed, cleanliness, and footprint.

Industrial Vacuum Pumps Market
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By End-User Industry: Chips dominate, batteries surge

Semiconductor fabs accounted for 32% of the vacuum pump market size in 2024, reflecting the dense capital expenditure across APAC mega-fabs. AI accelerators and HBM memory expansion sustain slot bookings well beyond typical cycle downturns. Each 200 mm fab installs around 600 critical pumps, while a 300 mm EUV fab can exceed 5,000 units. Battery plants are experiencing the fastest-growing adjacency, with an 8.40% CAGR, as cell producers target 9 TWh of global capacity by 2030. Anode coating, electrolyte filling, and vacuum-drying stations all require oil-free pumps to prevent solvent inclusions that degrade cell life.

Oil and gas, chemicals, and pharmaceuticals constitute durable second-tier demand pillars. LNG liquefaction, advanced polymer dehydration, and fill-finish isolators each specify tailored vacuum profiles. Vacuum service providers thus diversify into application engineering, bundling pumps with dryers, condensers, and controls to deliver turnkey skid packages.

Geography Analysis

APAC accounted for 48% of the vacuum pump market in 2024 and is forecast to expand at a 7.80% CAGR through 2030. China, Japan, and South Korea account for more than 65% of global wafer starts, making them bellwethers for high-end demand. Government incentives, such as India’s USD 10 billion semiconductor subsidy, signal the diffusion of regional capacity and an incremental vacuum pull. Local battery giants CATL, LG Energy Solution, and Panasonic are scheduling gigafactory expansions that will each require thousands of dry screw pumps for their electrode and coating lines.

North America repositions supply chains via the CHIPS and Science Act. Edwards’ USD 319 million Genesee County plant will produce 10,000 dry pumps annually, reducing import lead times by eight weeks and decreasing fabs’ carbon footprints.[4]New York State Governor’s Office, “Governor Hochul and Majority Leader Schumer Announce Start of Construction for Edwards Vacuum’s USD 319 Million Semiconductor Supply Chain Facility in Genesee County,” governor.ny.gov Regional OEMs pair production moves with digital service centers, improving mean time to repair for domestic customers.

Europe maintains focus on advanced packaging, GaN and SiC materials, leveraging Horizon EU funding for energy-efficient process equipment. Atlas Copco’s technology centers in Sweden and Belgium advance variable-speed compression platforms that share controls, spare parts and service crews with adjacent vacuum portfolios. Middle East and Africa are niche today yet benefit from LNG liquefaction projects requiring large-capacity cryogenic pumps paired with CO₂ capture modules—footholds that could mature into wider regional opportunities post-2030.

Industrial Vacuum Pumps Market
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Competitive Landscape

Industry leadership is moderately concentrated, with the top five players accounting for roughly 55-60% of the combined revenue. Atlas Copco’s USD 1.6 billion Edwards acquisition, Pfeiffer’s integration within the Busch Group, and Ebara’s hydrogen pump investment underscore a strategic pivot toward breadth of technology and lifecycle services. Scale enables deeper R&D pockets for smart-pump firmware, hydrogen handling, and PFAS substitutes. Competitors also reshape portfolios through selective M&A: Atlas Copco’s acquisition of Kyungwon adds compressor synergies in Korea, while the acquisitions of helium-leak detector specialists strengthen semiconductor credibility.

Growth strategies migrate away from hardware margins toward service annuities and data monetization. Condition-based service contracts yield 15-20% EBIT margins, which is double that of initial equipment sales. Suppliers embed secure gateways and AI diagnostics to alert technicians before pressure deviations exceed specification capability, now a table-stakes requirement for fab procurements.

White-space opportunities center on hydrogen infrastructure, battery recycling, and quantum computing chambers. Ebara’s JPY 16 billion (USD 107 million) hydrogen test complex positions it for first-mover advantage in cryogenic liquid pumps operating at -253 °C. The ability to guarantee uptime under novel chemistries becomes a decisive bid factor, erecting barriers against low-cost entrants.

Vacuum Pump Industry Leaders

  1. Ingersoll Rand Inc.

  2. Atlas Copco AB

  3. Flowserve Corporation

  4. Busch Vacuum Solutions (Busch group)

  5. Pfeiffer Vacuum GmbH (Pfeiffer Vacuum Technology AG)

  6. *Disclaimer: Major Players sorted in no particular order
Vacuum Pump Market Concentration
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Recent Industry Developments

  • March 2025: Atlas Copco agreed to acquire Kyungwon Machinery for 60 BKRW (USD 465 million) to extend oil-free screw compressor and vacuum offerings for Korean semiconductor and automotive customers
  • October 2024: Pfeiffer Vacuum rebranded as Pfeiffer Vacuum+Fab Solutions to emphasize fab-level integration and celebrate 70 years of turbomolecular innovation
  • September 2024: EBARA launched a JPY 16 billion (USD 107 million) hydrogen-pump test center in Futtsu City scheduled to open in 2025
  • August 2024: Edwards Vacuum confirmed construction progress on its USD 319 million dry-pump factory in New York, targeting a 13,000-ton annual CO₂ reduction once fully operational
  • April 2024: Baker Hughes secured a supply award for electric-drive liquefaction technology at Canada’s Cedar LNG project, incorporating six centrifugal vacuum pumps

Table of Contents for Vacuum Pump Industry Report

1. INTRODUCTION

  • 1.1 Study Assumption and Market Definition
  • 1.2 Scope of the Study

2. RESEARCH METHODOLOGY

3. EXECUTIVE SUMMARY

4. MARKET LANDSCAPE

  • 4.1 Market Overview
  • 4.2 Market Drivers
    • 4.2.1 Semiconductor-grade vacuum in EUV lithography
    • 4.2.2 Accelerated LNG capacity additions post-2025
    • 4.2.3 Rapid uptake of Industry 4.0 smart pumps
    • 4.2.4 Growth of global biologics fill-finish lines
    • 4.2.5 Battery-grade graphite anode production boom
    • 4.2.6 Green-hydrogen electrolyzer build-out
  • 4.3 Market Restraints
    • 4.3.1 Volatile rare-earth prices (NdFeB motors)
    • 4.3.2 Stricter PFAS lubricant regulations
    • 4.3.3 High TCO in ultra-high-vacuum (UHV) ranges
    • 4.3.4 Skilled-labor shortage for pump servicing
  • 4.4 Value / Supply-Chain Analysis
  • 4.5 Regulatory Landscape
  • 4.6 Technological Outlook
  • 4.7 Porter's Five Forces
    • 4.7.1 Bargaining Power of Suppliers
    • 4.7.2 Bargaining Power of Buyers
    • 4.7.3 Threat of New Entrants
    • 4.7.4 Threat of Substitutes
    • 4.7.5 Intensity of Competitive Rivalry

5. MARKET SIZE AND GROWTH FORECASTS (VALUE)

  • 5.1 By Pump Principle (Mechanical vs Entrapment)
    • 5.1.1 Mechanical (Rotary, Reciprocating, Kinetic, Dynamic)
    • 5.1.2 Entrapment (Cryogenic, Getter, Ion)
  • 5.2 By Lubrication
    • 5.2.1 Dry Vacuum Pumps
    • 5.2.2 Oil-Sealed / Wet Vacuum Pumps
  • 5.3 By Vacuum Level (ISO/ASTM Pressure Range)
    • 5.3.1 Rough / Low (10³–1 mbar)
    • 5.3.2 Medium (1–10⁻³ mbar)
    • 5.3.3 High (10⁻³–10⁻⁷ mbar)
    • 5.3.4 Ultra-High / Extreme (<10⁻⁷ mbar)
  • 5.4 By End-user Industry
    • 5.4.1 Oil and Gas
    • 5.4.2 Semiconductor and Electronics
    • 5.4.3 Pharmaceutical and Biotechnology
    • 5.4.4 Chemical Processing
    • 5.4.5 Food and Beverage
    • 5.4.6 Power Generation
    • 5.4.7 Wood, Paper and Pulp
    • 5.4.8 Others (Metallurgy, Research and Development)
  • 5.5 By Geography
    • 5.5.1 North America
    • 5.5.1.1 United States
    • 5.5.1.2 Canada
    • 5.5.1.3 Mexico
    • 5.5.2 South America
    • 5.5.2.1 Brazil
    • 5.5.2.2 Argentina
    • 5.5.2.3 Rest of South America
    • 5.5.3 Europe
    • 5.5.3.1 Germany
    • 5.5.3.2 United Kingdom
    • 5.5.3.3 France
    • 5.5.3.4 Italy
    • 5.5.3.5 Spain
    • 5.5.3.6 Russia
    • 5.5.3.7 Rest of Europe
    • 5.5.4 APAC
    • 5.5.4.1 China
    • 5.5.4.2 Japan
    • 5.5.4.3 India
    • 5.5.4.4 South Korea
    • 5.5.4.5 Southeast Asia
    • 5.5.4.6 Australia
    • 5.5.4.7 Rest of APAC
    • 5.5.5 Middle East
    • 5.5.5.1 Saudi Arabia
    • 5.5.5.2 UAE
    • 5.5.5.3 Turkey
    • 5.5.5.4 Rest of Middle East
    • 5.5.6 Africa
    • 5.5.6.1 South Africa
    • 5.5.6.2 Egypt
    • 5.5.6.3 Nigeria
    • 5.5.6.4 Rest of Africa

6. COMPETITIVE LANDSCAPE

  • 6.1 Market Concentration
  • 6.2 Strategic Moves
  • 6.3 Market Share Analysis
  • 6.4 Company Profiles (includes Global level Overview, Market level overview, Core Segments, Financials as available, Strategic Information, Market Rank/Share, Products and Services, Recent Developments)
    • 6.4.1 Atlas Copco AB
    • 6.4.2 Ingersoll Rand
    • 6.4.3 Busch Vacuum Solutions
    • 6.4.4 Pfeiffer Vacuum
    • 6.4.5 ULVAC Inc.
    • 6.4.6 Flowserve Corp.
    • 6.4.7 Agilent Technologies
    • 6.4.8 Leybold GmbH
    • 6.4.9 Ebara Corporation
    • 6.4.10 Shimadzu Corporation
    • 6.4.11 Gardner Denver
    • 6.4.12 Kinney (Tuthill)
    • 6.4.13 Osaka Vacuum
    • 6.4.14 Kashiyama Industries
    • 6.4.15 Becker Pumps
    • 6.4.16 Graham Corporation
    • 6.4.17 Wintek Corporation
    • 6.4.18 Tsurumi Mfg.
    • 6.4.19 Shinko Seiki Co., Ltd.
    • 6.4.20 Leyco Vacuum

7. MARKET OPPORTUNITIES AND FUTURE OUTLOOK

  • 7.1 White-space and Unmet-Need Assessment
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Research Methodology Framework and Report Scope

Market Definitions and Key Coverage

Our study defines the global vacuum pump market as the annual revenue generated from sales of new mechanical, kinetic, or entrapment pumps engineered to evacuate gases from sealed volumes across industrial, scientific, and commercial settings. Units integrated within broader systems are included only when priced as discrete pump assemblies measurable in US-dollar terms.

Scope Exclusions: Refurbished pumps, aftermarket parts, rental fleets, and field-maintenance services are outside this scope.

Segmentation Overview

  • By Pump Principle (Mechanical vs Entrapment)
    • Mechanical (Rotary, Reciprocating, Kinetic, Dynamic)
    • Entrapment (Cryogenic, Getter, Ion)
  • By Lubrication
    • Dry Vacuum Pumps
    • Oil-Sealed / Wet Vacuum Pumps
  • By Vacuum Level (ISO/ASTM Pressure Range)
    • Rough / Low (10³–1 mbar)
    • Medium (1–10⁻³ mbar)
    • High (10⁻³–10⁻⁷ mbar)
    • Ultra-High / Extreme (<10⁻⁷ mbar)
  • By End-user Industry
    • Oil and Gas
    • Semiconductor and Electronics
    • Pharmaceutical and Biotechnology
    • Chemical Processing
    • Food and Beverage
    • Power Generation
    • Wood, Paper and Pulp
    • Others (Metallurgy, Research and Development)
  • By Geography
    • North America
      • United States
      • Canada
      • Mexico
    • South America
      • Brazil
      • Argentina
      • Rest of South America
    • Europe
      • Germany
      • United Kingdom
      • France
      • Italy
      • Spain
      • Russia
      • Rest of Europe
    • APAC
      • China
      • Japan
      • India
      • South Korea
      • Southeast Asia
      • Australia
      • Rest of APAC
    • Middle East
      • Saudi Arabia
      • UAE
      • Turkey
      • Rest of Middle East
    • Africa
      • South Africa
      • Egypt
      • Nigeria
      • Rest of Africa

Detailed Research Methodology and Data Validation

Primary Research

Interviews with plant engineers, semiconductor tool buyers, chemical-process integrators, and regional distributors across North America, Europe, China, Japan, and India helped validate utilization rates, average selling prices, and emerging design-in preferences, filling data gaps flagged during desk work and anchoring scenario ranges.

Desk Research

We gathered foundational statistics from tier-1 public sources such as UN Comtrade shipment codes, Eurostat PRODCOM output tables, the US Census Bureau's Current Industrial Reports, Semiconductor Industry Association fab-capex releases, and International Energy Agency downstream refinery throughput updates. Company 10-Ks, investor decks, and reputable trade journals supplemented demand signals, while D&B Hoovers and Dow Jones Factiva furnished hard-to-find revenue splits. These sources shaped baseline volumes, pricing corridors, and end-market mix; many other references supported interim checks and clarifications.

Market-Sizing & Forecasting

Top-down reconstruction starts with production and trade data for rough/medium-vacuum equipment, which are then aligned to capital-spending ratios in semiconductors, refined-chemical output, pharmaceutical sterile-pack lines, and wafer-fab floor-space additions. Supplier roll-ups on sampled ASP × volume provide a bottom-up reasonableness check before figures are finalized. Key variables like global wafer starts, refinery turnaround schedules, pharmaceutical sterile-fill vials, PMI-linked machinery orders, and average pump replacement cycles feed a multivariate regression model; scenario analysis adjusts for cyclical capex swings.

Data Validation & Update Cycle

Mordor analysts run variance tests against external trade values, customs duty collections, and publicly reported vendor revenues. Anomalies trigger re-contacts with interviewees, followed by peer review before sign-off. The model refreshes annually, with mid-cycle updates if material events shift demand outlooks.

Why Mordor's Industrial Vacuum Pumps Baseline Commands Reliability

Estimates published by different firms often diverge because each chooses its own scope borders, variable sets, and refresh cadence.

Key gap drivers include selective exclusion of ultra-high-vacuum tiers, omission of electronics brownfield retrofits, differing ASP progression logic, and less frequent updates that miss currency and inflation resets. Mordor's disciplined inclusion rules and yearly recalibration narrow these gaps convincingly.

Benchmark comparison

Market Size Anonymized source Primary gap driver
USD 7.56 B (2025) Mordor Intelligence -
USD 6.50 B (2025) Global Consultancy A Excludes ultra-high-vacuum pumps; relies on static ASP ladder
USD 6.90 B (2025†) Industry Journal B Limits scope to process industries; updates every three years
USD 5.97 B (2025) Research Boutique C Omits semiconductor clean-room demand and uses conservative currency conversion

Across sources, our value sits mid-range yet is underpinned by transparent variables, live primary inputs, and yearly reviews, giving decision-makers a balanced, repeatable baseline they can trust.

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Key Questions Answered in the Report

Why is the vacuum pump market growing faster in ultra-high vacuum than in other pressure bands?

EUV lithography, particle physics and advanced surface-analysis demand pressures below 10⁻⁷ mbar, pushing premium orders that grow at 9.20% CAGR.

How do PFAS regulations influence purchasing decisions?

As EU and US frameworks restrict PFAS lubricants, buyers shift toward dry, oil-free pumps to sidestep future compliance and disposal costs.

What role do smart pumps play in energy savings?

Variable-speed drives and cloud analytics lower pump-related power draw by up to 30% and cut unplanned downtime, a financial priority in semiconductor fabs where outages cost more than USD 1 million per hour.

Which region leads demand and why?

APAC holds 48% market share due to concentrated semiconductor and battery gigafactory investments across China, Japan and South Korea, plus emerging capacity in India.

Are supply chains secure for rare-earth-dependent pump motors?

Exposure remains high; price volatility in neodymium magnets adds cost risk. Manufacturers diversify sourcing and trial alternative magnet chemistries, but efficiency trade-offs persist.

What is the long-term outlook for oil-sealed pumps?

They continue serving cost-sensitive, medium-vacuum duties; however, their share declines as clean-room and environmental norms tighten and dry technologies offer lower lifecycle costs.

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