Mass Flow Controller Market Size & Share Analysis - Growth Trends & Forecasts (2025 - 2030)

The Mass Flow Controller Market Report is Segmented by Material Type (Stainless Steel, Exotic Alloys, Others), Flow Rate (Low, Medium, High), Product Type (Differential-Pressure MFC, Thermal MFC, Coriolis MFC, Pressure-Based MFC), End-User Industry (Semiconductor, Oil and Gas, Pharmaceutical and Biotechnology, Chemical, Food and Beverages, and More), and Geography. The Market Forecasts are Provided in Terms of Value (USD).

Mass Flow Controller Market Size and Share

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Mass Flow Controller Market Analysis by Mordor Intelligence

The mass flow controller market size stood at USD 1.92 billion in 2025 and is forecast to climb to USD 2.69 billion by 2030, advancing at a 6.99% CAGR. This steady trajectory reflected how precision gas-flow devices shifted from a niche laboratory tool into a production-critical asset across chip fabrication, green hydrogen, additive manufacturing, and biologics processing. Customers invested in higher-purity gas lines, tighter leak tolerances, and integrated diagnostics to protect yields and minimize downtime. Semiconductor capital-expenditure commitments in Asia elevated baseline demand, while tighter environmental policies in Europe and North America spurred retrofit programs that replaced legacy flow meters with digital, self-monitoring platforms. Pricing pressure from Chinese entrants moderated average selling prices but also widened the addressable base of lower-tier users.

Key Report Takeaways

  • By material type, stainless steel held 48.3% of the mass flow controller market share in 2024; exotic alloys are set to expand at an 8.9% CAGR to 2030. 
  • By flow rate, low-flow applications accounted for 44.3% of the mass flow controller market size in 2024, while high-flow solutions are projected to grow at 9.4% through 2030. 
  • By product type, thermal technology led with 53.4% revenue share in 2024; Coriolis units are forecast to register a 10.3% CAGR over the same horizon. 
  • By end-user industry, semiconductor fabrication commanded 37.3% of the mass flow controller market size in 2024; renewable energy and fuel cells are poised for a 12.5% CAGR to 2030. 
  • By geography, Asia-Pacific dominated with 42.3% market share in 2024 and is on track for a 9.8% CAGR to 2030.

Segment Analysis

By Material Type: Exotic Alloys Extend Performance Envelope

Sales data indicated that stainless steel bodies captured 48.3% revenue in 2024 because they met the corrosion-resistance needs of most industrial gases at competitive price points. Exotic alloys such as Hastelloy and Inconel, however, posted the strongest 8.9% CAGR outlook as they enabled ultra-clean delivery of dopant gases in sub-10 nm semiconductor lines. Molybdenum price spikes near USD 90 per kg pushed fabricators to re-engineer weldments and reduce scrap rates to protect margins. Operators that upgraded to exotic alloys reported longer mean-time-between-service intervals and lower particle counts, advantages that outweighed the upfront premium. 

The mass flow controller market saw material choice evolving into a procurement lever: fabs standardized alloy SKUs to simplify spares, while biotech OEMs adopted electropolished Inconel for single-use bioreactors that demanded sterility. The “others” category—brass, bronze, and polymer composites—retained niche appeal for low-pressure benchtop devices. Global buyers negotiated dual-source contracts to shield against alloy shortages, making supply-chain resilience nearly as important as metallurgical performance. 

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By Flow Rate: High-Flow Solutions Gain Momentum

Low-flow devices, typically rated below 20 sccm, accounted for 44.3% of the mass flow controller market in 2024 because laboratories and analytical instruments favored finely resolved set-points. Yet high-flow units above 50 slm are set to grow 9.4% annually through 2030 as hydrogen plants, large-format 3D printers, and semiconductor wet benches scale up gas volumes. HORIBA’s ultra-thin DZ-107 controller demonstrated how vendors pushed compactness while managing etch-tool flows over 200 slm. Energy project developers specified flow turndown ratios exceeding 100:1 so one meter could cover startup purge and full-load operation, boosting demand for mixed-range product portfolios. 

OEMs optimized inventory by matching flow brackets precisely to duty cycles rather than oversizing, which reduced CapEx and improved control resolution. Meanwhile, medium-flow controllers remained pivotal in pharmaceutical fermentation skids and specialty chemical reactors that balanced batch accuracy with throughput. The mass flow controller market therefore fragmented into performance-tuned tiers instead of one-size-fits-all offerings, encouraging vendors to release specialized firmware and diaphragm selections for each flow band. 

By Product Type: Coriolis Measurement Accelerates

Thermal MFCs led revenue with 53.4% share in 2024 due to affordability and broad gas compatibility. Sensirion’s CMOS-based SFC6000 underscored ongoing innovation in this class, delivering ±0.5% accuracy and eight-week lead times that outpaced industry norms. Coriolis technology, though pricier, posted a 10.3% CAGR outlook because it measures mass directly, bypassing density corrections and calibration drift when users switch gas mixes. Hydrogen production skids valued this versatility because feed-stocks and purge streams changed with electrolyzer duty cycles. 

Differential-pressure controllers addressed niche uses where line pressure acted as the primary control variable, while pressure-based MFCs targeted legacy chemical plants that already relied on static pressure instruments. Product managers integrated multi-parameter sensing—temperature, pressure, density—into Coriolis bodies, enabling single-flange installation that saved footprint in crowded fabs. Continuous firmware upgrades added self-learning algorithms that compensated for sensor aging, extending calibration intervals and reducing total cost of ownership across the mass flow controller market. 

Mass Flow Controller Market: Market Share by Product Type
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By End-user Industry: Renewable Energy Surges Ahead

Semiconductor applications held 37.3% revenue share in 2024 because every advanced tool cluster required dozens of high-precision controllers for dopant, purge, and cooling gases. Yet renewable-energy and fuel-cell installations are projected to grow 12.5% annually through 2030, powered by national hydrogen roadmaps and stationary fuel-cell deployments. Flowserve’s 2024 acquisition of severe-service valve maker MOGAS brought metallurgies suited to hot ammonia crackers, signalling how flow-control portfolios expanded into green-energy niches. 

Oil and gas operations continued to invest in flare-gas monitoring to meet emissions targets, while pharmaceutical and biotechnology plants upgraded dissolved-oxygen control loops for cell-culture consistency. Food-and-beverage processors adopted nitrogen dosing to extend shelf life, and water utilities installed inline thermal meters to stabilize ozone disinfection systems. This broadened end-market mix insulated the mass flow controller market from single-sector downturns, providing a balanced revenue foundation. 

Geography Analysis

Asia-Pacific dominated with 42.3% revenue in 2024, buoyed by aggressive chip-fab buildouts in Taiwan, South Korea, and mainland China. Government subsidies and local content mandates accelerated adoption of domestically manufactured controllers, though multinational brands retained share in the clean-room segments that demanded sub-single-digit-sccm repeatability. The mass flow controller market size for Asia-Pacific is expected to register a 9.8% CAGR, anchored by continued hydrogen infrastructure rollouts in Japan and Australia.

North America benefited from the US Chips Act, which incentivized fab construction and boosted orders for corrosion-resistant alloy bodies that met ITAR and cybersecurity clauses. Fuel-cell truck pilots in California and Texas added incremental high-flow demand, while shale producers installed thermal meters for methane-leak detection. Europe advanced through decarbonization policy, channeling funds into electrolyzer plants in Germany, the Netherlands, and the Nordic region. The EU’s strict safety codes spurred uptake of SIL-rated devices.

Middle East and Africa witnessed selective uptake tied to LNG expansion and desalination projects, whereas South America explored green-ammonia export corridors in Chile and Brazil. Vendors tailored channel strategies—local assembly hubs in Singapore, service depots in Arizona, and joint ventures in Poland—to deliver shorter lead times and support localization requirements across the mass flow controller market.

Mass Flow Controller Market CAGR (%), Growth Rate by Region
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Competitive Landscape

The market remained moderately fragmented. MKS Instruments posted USD 936 million Q1 2025 revenue, confirming a rebound in wafer-fab equipment orders. Teledyne Technologies recorded USD 1.45 billion sales during the same period after integrating recent instrumentation acquisitions. These leaders leveraged cross-portfolio synergies—plasma sources, vacuum pumps, and gas analyzers—to lock in multiyear supply agreements with tier-1 fabs.

Strategic alliances escalated. Endress+Hauser absorbed 800 SICK employees into a flow-control joint venture that targeted process-industry digitalization. Crane Company agreed to acquire Precision Sensors and Instrumentation for USD 1,060 million, adding aerospace-grade flow transducers that carry over into hydrogen aviation prototypes. [3]Crane Company, “Crane Company to Acquire Precision Sensors & Instrumentation,” investors.craneco.com

Chinese challengers improved quality but still faced barriers in export-controlled segments. Sensirion differentiated through rapid-delivery programs, while Bronkhorst emphasized EU origin to shield customers from geopolitical risk. Start-ups focused on software overlays, offering analytics subscriptions that convert anonymized flow data into predictive maintenance insights. Intellectual-property filings around additive-manufacturing gas management and hydrogen leak detection suggested that specialized application know-how, rather than raw sensor accuracy, would shape the next competitive phase of the mass flow controller market.

Mass Flow Controller Industry Leaders

  1. HORIBA, Ltd.

  2. Sensirion AG

  3. MKS Instruments

  4. Brooks Instrument LLC

  5. Bronkhorst High-Tech B.V.

  6. *Disclaimer: Major Players sorted in no particular order
Mass Flow Controller Market Concentration
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Recent Industry Developments

  • September 2025: Crane Company announced the USD 1,060 million acquisition of Precision Sensors and Instrumentation from Baker Hughes, reinforcing aerospace and process-flow capabilities with expected USD 390 million 2025 sales.
  • July 2025: SICK and Endress+Hauser launched a process-automation partnership, transferring 800 SICK staff into the new Endress+Hauser SICK GmbH+Co. KG joint venture.
  • June 2025: Valmet secured a valve contract for Hycamite’s methane-splitting hydrogen plant in Finland, Europe’s largest such project.
  • May 2025: MKS Instruments reported USD 936 million Q1 2025 revenue, outpacing guidance on semiconductor demand.

Table of Contents for Mass Flow Controller Industry Report

1. INTRODUCTION

  • 1.1 Study Assumptions and Market Definition
  • 1.2 Scope of the Study

2. RESEARCH METHODOLOGY

3. EXECUTIVE SUMMARY

4. MARKET LANDSCAPE

  • 4.1 Market Overview
  • 4.2 Market Drivers
    • 4.2.1 Chip-fab CAPEX surge in Asia
    • 4.2.2 Green-hydrogen electrolyzer build-out
    • 4.2.3 Additive-manufacturing gas demand
    • 4.2.4 IIoT-enabled self-diagnostics adoption
    • 4.2.5 Biologics single-use bioreactors growth
    • 4.2.6 Emissions-regulation retrofits
  • 4.3 Market Restraints
    • 4.3.1 Helium supply tightness
    • 4.3.2 Low-cost Chinese price competition
    • 4.3.3 Lengthy multi-gas qualification cycles
    • 4.3.4 Particulate-induced field failures
  • 4.4 Value Chain Analysis
  • 4.5 Impact of Macroeconomic Factors
  • 4.6 Regulatory Landscape
  • 4.7 Technological Outlook
  • 4.8 Porter�s Five Forces Analysis
    • 4.8.1 Threat of New Entrants
    • 4.8.2 Bargaining Power of Buyers/Consumers
    • 4.8.3 Bargaining Power of Suppliers
    • 4.8.4 Threat of Substitute Products
    • 4.8.5 Intensity of Competitive Rivalry

5. MARKET SIZE AND GROWTH FORECASTS (VALUE)

  • 5.1 By Material Type
    • 5.1.1 Stainless Steel
    • 5.1.2 Exotic Alloys
    • 5.1.3 Others (Brass, Bronze)
  • 5.2 By Flow Rate
    • 5.2.1 Low Flow Rate
    • 5.2.2 Medium Flow Rate
    • 5.2.3 High Flow Rate
  • 5.3 By Product Type
    • 5.3.1 Differential-Pressure MFC
    • 5.3.2 Thermal MFC
    • 5.3.3 Coriolis MFC
    • 5.3.4 Pressure-Based MFC
  • 5.4 By End-user Industry
    • 5.4.1 Semiconductor
    • 5.4.2 Oil and Gas
    • 5.4.3 Pharmaceutical and Biotechnology
    • 5.4.4 Chemical
    • 5.4.5 Food and Beverages
    • 5.4.6 Water and Wastewater Treatment
    • 5.4.7 Healthcare and Life Sciences
    • 5.4.8 Renewable Energy and Fuel Cells
    • 5.4.9 Others
  • 5.5 By Geography
    • 5.5.1 North America
    • 5.5.1.1 United States
    • 5.5.1.2 Canada
    • 5.5.1.3 Mexico
    • 5.5.2 South America
    • 5.5.2.1 Brazil
    • 5.5.2.2 Argentina
    • 5.5.2.3 Rest of South America
    • 5.5.3 Europe
    • 5.5.3.1 Germany
    • 5.5.3.2 United Kingdom
    • 5.5.3.3 France
    • 5.5.3.4 Italy
    • 5.5.3.5 Spain
    • 5.5.3.6 Russia
    • 5.5.3.7 Rest of Europe
    • 5.5.4 Asia-Pacific
    • 5.5.4.1 China
    • 5.5.4.2 Japan
    • 5.5.4.3 South Korea
    • 5.5.4.4 India
    • 5.5.4.5 Taiwan
    • 5.5.4.6 Rest of Asia-Pacific
    • 5.5.5 Middle East and Africa
    • 5.5.5.1 Middle East
    • 5.5.5.1.1 Saudi Arabia
    • 5.5.5.1.2 United Arab Emirates
    • 5.5.5.1.3 Turkey
    • 5.5.5.1.4 Rest of Middle East
    • 5.5.5.2 Africa
    • 5.5.5.2.1 South Africa
    • 5.5.5.2.2 Nigeria
    • 5.5.5.2.3 Egypt
    • 5.5.5.2.4 Rest of Africa

6. COMPETITIVE LANDSCAPE

  • 6.1 Market Concentration
  • 6.2 Strategic Moves
  • 6.3 Market Share Analysis
  • 6.4 Company Profiles (includes Global level Overview, Market level overview, Core Segments, Financials as available, Strategic Information, Market Rank/Share for key companies, Products and Services, and Recent Developments)
    • 6.4.1 HORIBA Ltd.
    • 6.4.2 Sensirion AG
    • 6.4.3 MKS Instruments Inc.
    • 6.4.4 Teledyne Technologies Incorporated
    • 6.4.5 Bronkhorst High-Tech B.V.
    • 6.4.6 Brooks Instrument LLC
    • 6.4.7 Christian Brkert GmbH & Co. KG
    • 6.4.8 Sierra Instruments Inc.
    • 6.4.9 Alicat Scientific Inc.
    • 6.4.10 Parker Hannifin Corporation
    • 6.4.11 Advanced Energy Industries Inc.
    • 6.4.12 Azbil Corporation
    • 6.4.13 SMC Corporation
    • 6.4.14 Fujikin Incorporated
    • 6.4.15 Hitachi Metals Ltd.
    • 6.4.16 Tokyo Keiso Co. Ltd.
    • 6.4.17 Omega Engineering Inc.
    • 6.4.18 TSI Incorporated
    • 6.4.19 Dwyer Instruments LLC
    • 6.4.20 Aalborg Instruments & Controls Inc.
    • 6.4.21 Vogtlin Instruments AG
    • 6.4.22 Fluke Corporation
    • 6.4.23 Shanghai Fengyua Fluid Technology Co. Ltd.
    • 6.4.24 Ningbo Huazhong Instrument Co. Ltd.
    • 6.4.25 KOFLOC Corporation

7. MARKET OPPORTUNITIES AND FUTURE OUTLOOK

  • 7.1 White-space and Unmet-need Assessment
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Global Mass Flow Controller Market Report Scope

Mass Flow Controllers (MFCs) measure and regulate the flow of gases or liquids in various systems. By adjusting the flow path, MFCs maintain a precise and consistent flow rate, compensating for fluctuations in pressure, temperature, and other influencing factors.

The study tracks the revenue accrued through the sale of mass flow controller by various players across the globe. It also tracks the key market parameters, underlying growth influencers, and major vendors operating in the industry, which supports the market estimations and growth rates over the forecast period. The study further analyses the overall impact of COVID-19 aftereffects and other macroeconomic factors on the market. The report’s scope encompasses market sizing and forecasts for the various market segments.

The mass flow controller market is segmented by material type (stainless steel and exotic alloys), flow rate (low flow rate, medium flow rate, and high flow rate), product type (differential pressure flow meter, thermal mass flow meter, and coriolis mass flow meter), industry(oil & gas, pharmaceutical, food & beverages, chemical, healthcare & life sciences, semiconductor, water & wastewater treatment, and others), and geography (North America, Europe, Asia Pacific, Middle East and Africa, and Latin America. The market sizes and forecasts regarding value (USD) for all the above segments are provided.

By Material Type Stainless Steel
Exotic Alloys
Others (Brass, Bronze)
By Flow Rate Low Flow Rate
Medium Flow Rate
High Flow Rate
By Product Type Differential-Pressure MFC
Thermal MFC
Coriolis MFC
Pressure-Based MFC
By End-user Industry Semiconductor
Oil and Gas
Pharmaceutical and Biotechnology
Chemical
Food and Beverages
Water and Wastewater Treatment
Healthcare and Life Sciences
Renewable Energy and Fuel Cells
Others
By Geography North America United States
Canada
Mexico
South America Brazil
Argentina
Rest of South America
Europe Germany
United Kingdom
France
Italy
Spain
Russia
Rest of Europe
Asia-Pacific China
Japan
South Korea
India
Taiwan
Rest of Asia-Pacific
Middle East and Africa Middle East Saudi Arabia
United Arab Emirates
Turkey
Rest of Middle East
Africa South Africa
Nigeria
Egypt
Rest of Africa
By Material Type
Stainless Steel
Exotic Alloys
Others (Brass, Bronze)
By Flow Rate
Low Flow Rate
Medium Flow Rate
High Flow Rate
By Product Type
Differential-Pressure MFC
Thermal MFC
Coriolis MFC
Pressure-Based MFC
By End-user Industry
Semiconductor
Oil and Gas
Pharmaceutical and Biotechnology
Chemical
Food and Beverages
Water and Wastewater Treatment
Healthcare and Life Sciences
Renewable Energy and Fuel Cells
Others
By Geography
North America United States
Canada
Mexico
South America Brazil
Argentina
Rest of South America
Europe Germany
United Kingdom
France
Italy
Spain
Russia
Rest of Europe
Asia-Pacific China
Japan
South Korea
India
Taiwan
Rest of Asia-Pacific
Middle East and Africa Middle East Saudi Arabia
United Arab Emirates
Turkey
Rest of Middle East
Africa South Africa
Nigeria
Egypt
Rest of Africa
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Key Questions Answered in the Report

What is the current size of the mass flow controller market?

The market was valued at USD 1.92 billion in 2025 and is projected to reach USD 2.69 billion by 2030 at a 6.99% CAGR.

Which region leads the mass flow controller market?

Asia-Pacific led with 42.3% revenue in 2024 due to intensive semiconductor and green-hydrogen investments.

Which product technology is growing the fastest?

Coriolis mass flow controllers are forecast to expand at a 10.3% CAGR because they offer direct mass measurement and multi-parameter sensing.

How are helium shortages affecting the industry?

Supply tightness raised gas prices, prompting fabs to adopt recovery systems and ultra-tight controllers, yet it is expected to shave about 1.4 percentage points off the market’s CAGR in the short term.

Why are exotic alloys gaining traction in mass flow controllers?

Demand for ultra-high-purity and corrosive gas handling in advanced semiconductor and biotech processes is driving an 8.9% CAGR for exotic alloy-based units.

What role does IIoT play in the mass flow controller market?

Integrated diagnostics and real-time data streaming support predictive maintenance, improve yield, and differentiate premium models, contributing roughly 0.9 percentage points to forecast growth.

Page last updated on: July 8, 2025